@inproceedings{63e86378b20c4bc2a2c2f6581c29646f,

title = "Adsorption-induced Resonance Frequency Change in Submicron Structures",

abstract = "This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbate molecules bound to the upper and lower surface on the resonance frequency has been studied. The ratio between the thickness of the adsorbate layer and the thickness of cantilever will result in either a stiffness or a mass dominated behavior. This effect is investigated for various materials such as SAM (self assembled monolayer), Silicon, SU8, and myosim protein. This model gives insight into the decoupling of both opposite effects and can be used for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Index Terms-Adsorption, Resonance frequency, Submicron cantilever, Multilayer.",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Sadeghian Marnani}, H and JFL Goosen and A Bossche and {van Keulen}, F",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-90-73461-49-9",

publisher = "Technology Foundation STW",

pages = "621--624",

editor = "PJ French and K DeMeyer and W Krautschneider and LK Nanver and {van de Sanden}, MCM and J Schmitz",

booktitle = "Proceedings SAFE 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",

note = "null ; Conference date: 29-11-2007 Through 30-11-2007",

}