Amorphous silicon carbide nitride layer as an alternative to a disordered silicon surface to suppress RF/microwave losses

S Evseev, LK Nanver, B Rejaei Salmassi, S Milosavljevic

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)2-7
Number of pages6
JournalMicroelectronic Engineering
Volume125
DOIs
Publication statusPublished - 2014

Cite this