Amorphous silicon carbide nitride layer as an alternative to a disordered silicon surface to suppress RF/microwave losses

S Evseev, LK Nanver, B Rejaei Salmassi, S Milosavljevic

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2-7
Number of pages6
JournalMicroelectronic Engineering
Volume125
DOIs
Publication statusPublished - 2014

Bibliographical note

Harvest
Available online 13-4-2014

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