An Acoustically-transparent Electrical Cap for Piezoelectric Ultrasound Transducer on Silicon

Research output: Contribution to conference › Abstract › Scientific

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Original language	English
Publication status	Published - 10 Sept 2023
Event	Eurosensors XXXIV - Lecce, Italy Duration: 10 Sept 2023 → 13 Sept 2023

Keywords

@conference{4d7c150eade84641b1ce253d3d095562,

title = "An Acoustically-transparent Electrical Cap for Piezoelectric Ultrasound Transducer on Silicon",

keywords = "ultrasound transducer, piezoelectric, microfabrication",

author = "G.K. Wardhana and {Lopes Marta da Costa}, T.M. and Massimo Mastrangeli",

year = "2023",

month = sep,

day = "10",

language = "English",

note = "Eurosensors XXXIV ; Conference date: 10-09-2023 Through 13-09-2023",

}

TY - CONF

T1 - An Acoustically-transparent Electrical Cap for Piezoelectric Ultrasound Transducer on Silicon

AU - Wardhana, G.K.

AU - Lopes Marta da Costa, T.M.

AU - Mastrangeli, Massimo

PY - 2023/9/10

Y1 - 2023/9/10

KW - ultrasound transducer

KW - piezoelectric

KW - microfabrication

M3 - Abstract

T2 - Eurosensors XXXIV

Y2 - 10 September 2023 through 13 September 2023

ER -