Abstract
Wheatstone bridge sensors are often used in precision instrumentation and measurement systems, e.g., for μK-resolution temperature sensing in wafer steppers [1] and mPa-resolution differential pressure sensing in precision air gauges [2]. Since they output small differential signals superimposed on a large common-mode (CM) voltage, typical bridge readout ICs (ROICs) consist of an instrumentation amplifier (IA) followed by an ADC [1]. This paper describes a low-noise energy-efficient ROIC, which achieves a 3.7nV/√Hz input-referred noise PSD and a power efficiency factor (PEF) of 44.1. The latter represents a 5× improvement on the state of the art [3].
Original language | English |
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Title of host publication | 2017 IEEE International Solid-State Circuits Conference, ISSCC 2017 |
Subtitle of host publication | Digest of Technical Papers |
Editors | Laura C. Fujino |
Place of Publication | Danvers, MA |
Publisher | IEEE |
Pages | 172-173 |
Number of pages | 2 |
Volume | 60 |
ISBN (Electronic) | 978-1-5090-3758-2 |
ISBN (Print) | 978-1-5090-3757-5 |
DOIs | |
Publication status | Published - 2017 |
Event | ISSCC 2017: 64th IEEE International Solid-State Circuits Conference - San Francisco, CA, United States Duration: 5 Feb 2017 → 9 Feb 2017 |
Conference
Conference | ISSCC 2017 |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 5/02/17 → 9/02/17 |
Bibliographical note
Session 9, Sensors 9.8Keywords
- Bridge circuits
- Energy efficiency
- Choppers (circuits)
- Sensors
- Impedance
- Logic gates
- Modulation