Anisotropic film growth during PVD on substrates in planetary motion

GCAM Janssen, J-D Kamminga, PFA Alkemade, S Grachev

    Research output: Contribution to conferencePosterProfessional

    Original languageUndefined/Unknown
    Publication statusPublished - 2003
    Event50th AVS meeting 2003 - Baltimore, USA
    Duration: 2 Nov 20037 Nov 2003

    Other

    Other50th AVS meeting 2003
    Period2/11/037/11/03

    Cite this

    Janssen, GCAM., Kamminga, J-D., Alkemade, PFA., & Grachev, S. (2003). Anisotropic film growth during PVD on substrates in planetary motion. Poster session presented at 50th AVS meeting 2003, .