Anisotropic film growth during PVD on substrates in planetary motion

GCAM Janssen, J-D Kamminga, PFA Alkemade, S Grachev

    Research output: Contribution to conference › Poster › Professional

    Original languageUndefined/Unknown
    Publication statusPublished - 2003
    Event50th AVS meeting 2003 - Baltimore, USA
    Duration: 2 Nov 2003 → 7 Nov 2003

    Other

    Other50th AVS meeting 2003
    Period2/11/03 → 7/11/03

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