Anisotropic growth of chromium films during sputter deposition on substrates in planetary motion

GCAM Janssen, PFA Alkemade, VGM Sivel, SY Grachev, JD Kamminga

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1773-1777
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Volume22
    Issue number4
    Publication statusPublished - 2004

    Keywords

    • ZX CWTS JFIS < 1.00

    Cite this