Anisotropic growth of chromium films during sputter deposition on substrates in planetary motion

GCAM Janssen, PFA Alkemade, VGM Sivel, SY Grachev, JD Kamminga

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1773-1777
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	22
Issue number	4
Publication status	Published - 2004

Keywords

@article{1c86cd4539e142d78a2e5095d2896a40,

title = "Anisotropic growth of chromium films during sputter deposition on substrates in planetary motion",

keywords = "ZX CWTS JFIS < 1.00",

author = "GCAM Janssen and PFA Alkemade and VGM Sivel and SY Grachev and JD Kamminga",

year = "2004",

language = "Undefined/Unknown",

volume = "22",

pages = "1773--1777",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Anisotropic growth of chromium films during sputter deposition on substrates in planetary motion

AU - Janssen, GCAM

AU - Alkemade, PFA

AU - Sivel, VGM

AU - Grachev, SY

AU - Kamminga, JD

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0734-2101

VL - 22

SP - 1773

EP - 1777

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 4

ER -