Applicability of iTIRM for roughness reduction monitoring

RJM van der Bijl, H van Brug, M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Optical Manufacturing and Testing III, Proceedings of SPIE.
Editors	H Philip Stahl
Pages	340-344
Number of pages	5
Publication status	Published - 2001

Name

Name
Volume	4451

San Diego CA, USA

Keywords

@inproceedings{a43429ea57dd4f28bb40f8ccd76abd9d,

title = "Applicability of iTIRM for roughness reduction monitoring",

keywords = "Conf.proc. > 3 pag",

author = "{van der Bijl}, RJM and {van Brug}, H and M Singh and JJM Braat",

note = "San Diego CA, USA",

year = "2001",

language = "Undefined/Unknown",

pages = "340--344",

editor = "{Philip Stahl}, H",

booktitle = "Optical Manufacturing and Testing III, Proceedings of SPIE.",

}

TY - GEN

T1 - Applicability of iTIRM for roughness reduction monitoring

AU - van der Bijl, RJM

AU - van Brug, H

AU - Singh, M

AU - Braat, JJM

N1 - San Diego CA, USA

PY - 2001

Y1 - 2001

KW - Conf.proc. > 3 pag

UR - http://www.optica.tn.tudelft.nl/Publications/Applicability.pdf

M3 - Conference contribution

SP - 340

EP - 344

BT - Optical Manufacturing and Testing III, Proceedings of SPIE.

A2 - Philip Stahl, H

ER -