Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

G Fiorentino, WH Syed, AJL Adam, A Neto, PM Sarro

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1497-1500
Number of pages4
JournalProcedia Engineering
Publication statusPublished - 2014
Event28th European Conference on Solid-State Transducers - Brescia, Italy
Duration: 7 Sep 201410 Sep 2014
Conference number: 28


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