Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

G Fiorentino, WH Syed, AJL Adam, A Neto, PM Sarro

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Pages (from-to)	1497-1500
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.582
Publication status	Published - 2014
Event	28th European Conference on Solid-State Transducers - Brescia, Italy Duration: 7 Sept 2014 → 10 Sept 2014 Conference number: 28

Keywords

@article{6f3abc7917b24f51a93807811a18a31c,

title = "Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications",

keywords = "popular journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "G Fiorentino and WH Syed and AJL Adam and A Neto and PM Sarro",

year = "2014",

doi = "10.1016/j.proeng.2014.11.582",

language = "English",

volume = "87",

pages = "1497--1500",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

note = "28th European Conference on Solid-State Transducers, EUROSENSORS 2014 ; Conference date: 07-09-2014 Through 10-09-2014",

}

TY - JOUR

T1 - Artificial dielectric layer based on PECVD silicon carbide for terahertz sensing applications

AU - Fiorentino, G

AU - Syed, WH

AU - Adam, AJL

AU - Neto, A

AU - Sarro, PM

N1 - Conference code: 28

PY - 2014

Y1 - 2014

KW - popular journal papers

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1016/j.proeng.2014.11.582

DO - 10.1016/j.proeng.2014.11.582

M3 - Conference article

SN - 1877-7058

VL - 87

SP - 1497

EP - 1500

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers

Y2 - 7 September 2014 through 10 September 2014

ER -