Assessment of testing methodologies for thin-film vacuum MEMS packages

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	161-168
Number of pages	8
Journal	Microsystem Technologies: micro and nanosystems - information storage and processing systems
Publication status	Published - 2008

DOI 10.1007/s00542-008-0651-y

Keywords

@article{f133a6da9b3a4930b981025117a5986c,

title = "Assessment of testing methodologies for thin-film vacuum MEMS packages",

keywords = "CWTS JFIS < 0.75",

author = "Q Li and JFL Goosen and {van Keulen}, F and {van Beek}, JTM and GQ Zhang",

note = "DOI 10.1007/s00542-008-0651-y",

year = "2008",

language = "Undefined/Unknown",

pages = "161--168",

journal = "Microsystem Technologies: micro and nanosystems - information storage and processing systems",

issn = "0946-7076",

publisher = "Springer",

}

TY - JOUR

T1 - Assessment of testing methodologies for thin-film vacuum MEMS packages

AU - Li, Q

AU - Goosen, JFL

AU - van Keulen, F

AU - van Beek, JTM

AU - Zhang, GQ

N1 - DOI 10.1007/s00542-008-0651-y

PY - 2008

Y1 - 2008

KW - CWTS JFIS < 0.75

UR - http://www.springerlink.com/content/qu8t4rkk81803850/

M3 - Article

SN - 0946-7076

SP - 161

EP - 168

JO - Microsystem Technologies: micro and nanosystems - information storage and processing systems

JF - Microsystem Technologies: micro and nanosystems - information storage and processing systems

ER -