Assessment of testing methodologies for thin-film vacuum MEMS packages

Q Li, JFL Goosen, F van Keulen, JTM van Beek, GQ Zhang

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)161-168
Number of pages8
JournalMicrosystem Technologies: micro and nanosystems - information storage and processing systems
Publication statusPublished - 2008

Bibliographical note

DOI 10.1007/s00542-008-0651-y


  • CWTS JFIS < 0.75

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