Autonomous self-aligning and self-calibrating capacitive sensor system

OS van de Ven, D Yang, S Xia, JP van Schieveen, JW Spronck, RH Munnig Schmidt, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)


An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations. Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator
Original languageEnglish
Title of host publicationProceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems
EditorsM Kamel, F Karray, H Hagras
Place of PublicationBerlin-Heidelberg, Germany
Number of pages8
ISBN (Print)978-3-642-31367-7
Publication statusPublished - 2012
EventAIS 2012, Alveiro, Portuga - Berlin-Heidelberg, Germany
Duration: 25 Jun 201227 Jun 2012

Publication series

PublisherSpringer Verlag
NameLecture Notes in Artificial Intelligence
ISSN (Print)0302-9743


ConferenceAIS 2012, Alveiro, Portuga


  • conference contrib. refereed
  • Conf.proc. > 3 pag


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