Autonomous self-aligning and self-calibrating capacitive sensor system

OS van de Ven; D Yang; S Xia; JP van Schieveen; JW Spronck; RH Munnig Schmidt; S Nihtianov

Autonomous self-aligning and self-calibrating capacitive sensor system

OS van de Ven, D Yang, S Xia, JP van Schieveen, JW Spronck, RH Munnig Schmidt, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Abstract

An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations. Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator

Original language	English
Title of host publication	Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems
Editors	M Kamel, F Karray, H Hagras
Place of Publication	Berlin-Heidelberg, Germany
Publisher	Springer
Pages	10-17
Number of pages	8
ISBN (Print)	978-3-642-31367-7
Publication status	Published - 2012
Event	AIS 2012, Alveiro, Portuga - Berlin-Heidelberg, Germany Duration: 25 Jun 2012 → 27 Jun 2012

Publication series

Name
Publisher	Springer Verlag

Name	Lecture Notes in Artificial Intelligence
Volume	7326
ISSN (Print)	0302-9743

Conference

Conference	AIS 2012, Alveiro, Portuga
Period	25/06/12 → 27/06/12

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

van de Ven, OS., Yang, D., Xia, S., van Schieveen, JP., Spronck, JW., Munnig Schmidt, RH., & Nihtianov, S. (2012). Autonomous self-aligning and self-calibrating capacitive sensor system. In M. Kamel, F. Karray, & H. Hagras (Eds.), Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems (pp. 10-17). (Lecture Notes in Artificial Intelligence; Vol. 7326). Springer.

@inproceedings{924751763f544375992b7d445bf7dffc,

title = "Autonomous self-aligning and self-calibrating capacitive sensor system",

abstract = "An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations. Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van de Ven}, OS and D Yang and S Xia and {van Schieveen}, JP and JW Spronck and {Munnig Schmidt}, RH and S Nihtianov",

year = "2012",

language = "English",

isbn = "978-3-642-31367-7",

publisher = "Springer",

pages = "10--17",

editor = "M Kamel and F Karray and H Hagras",

booktitle = "Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems",

note = "AIS 2012, Alveiro, Portuga ; Conference date: 25-06-2012 Through 27-06-2012",

}

van de Ven, OS, Yang, D, Xia, S, van Schieveen, JP, Spronck, JW, Munnig Schmidt, RH & Nihtianov, S 2012, Autonomous self-aligning and self-calibrating capacitive sensor system. in M Kamel, F Karray & H Hagras (eds), Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems. Lecture Notes in Artificial Intelligence, vol. 7326, Springer, Berlin-Heidelberg, Germany, pp. 10-17, AIS 2012, Alveiro, Portuga, 25/06/12.

Autonomous self-aligning and self-calibrating capacitive sensor system. / van de Ven, OS; Yang, D; Xia, S et al.
Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems. ed. / M Kamel; F Karray; H Hagras. Berlin-Heidelberg, Germany: Springer, 2012. p. 10-17 (Lecture Notes in Artificial Intelligence; Vol. 7326).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Autonomous self-aligning and self-calibrating capacitive sensor system

AU - van de Ven, OS

AU - Yang, D

AU - Xia, S

AU - van Schieveen, JP

AU - Spronck, JW

AU - Munnig Schmidt, RH

AU - Nihtianov, S

PY - 2012

Y1 - 2012

N2 - An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations. Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator

AB - An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations. Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

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M3 - Conference contribution

SN - 978-3-642-31367-7

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BT - Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems

A2 - Kamel, M

A2 - Karray, F

A2 - Hagras, H

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CY - Berlin-Heidelberg, Germany

T2 - AIS 2012, Alveiro, Portuga

Y2 - 25 June 2012 through 27 June 2012

ER -

van de Ven OS, Yang D, Xia S, van Schieveen JP, Spronck JW, Munnig Schmidt RH et al. Autonomous self-aligning and self-calibrating capacitive sensor system. In Kamel M, Karray F, Hagras H, editors, Proceedings of the 2012 3rd International Conference on Autonomous and Intelligent Systems. Berlin-Heidelberg, Germany: Springer. 2012. p. 10-17. (Lecture Notes in Artificial Intelligence).

Autonomous self-aligning and self-calibrating capacitive sensor system

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