TY - JOUR
T1 - Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator
AU - Daryani, Mehdi Mollaie
AU - Manzaneque, Tomás
AU - Wei, J.
AU - Ghatkesar, Murali Krishna
PY - 2022
Y1 - 2022
N2 - The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR. [Figure not available: see fulltext.].
AB - The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR. [Figure not available: see fulltext.].
UR - http://www.scopus.com/inward/record.url?scp=85137347857&partnerID=8YFLogxK
U2 - 10.1038/s41378-022-00425-8
DO - 10.1038/s41378-022-00425-8
M3 - Article
AN - SCOPUS:85137347857
SN - 2096-1030
VL - 8
JO - Microsystems and Nanoengineering
JF - Microsystems and Nanoengineering
IS - 1
M1 - 92
ER -