Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range

JHG Correia, M Bartek, RF Wolffenbuttel

Research output: Contribution to journalArticleScientific

60 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)191-196
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume76
Issue number1-3
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

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