C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile

M Popadic; C Xu; F Sarubbi; LK Nanver

C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile

M Popadic, C Xu, F Sarubbi, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009
Editors	D Tsoukalas, A Dimoulas, Y Papananos, S Galata
Place of Publication	Athens, Greece
Publisher	IEEE Society
Pages	303-306
Number of pages	4
Publication status	Published - 2009
Event	39th European Solid-State Device Research Conference, ESSDERC 2009 - Athens, Greece Duration: 14 Sept 2009 → 18 Sept 2009

Publication series

Name
Publisher	IEEE

Conference

Conference	39th European Solid-State Device Research Conference, ESSDERC 2009
Period	14/09/09 → 18/09/09

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{d859d6bd786945f7b223ebedef113589,

title = "C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile",

keywords = "Conf.proc. > 3 pag",

author = "M Popadic and C Xu and F Sarubbi and LK Nanver",

year = "2009",

language = "Undefined/Unknown",

publisher = "IEEE Society",

pages = "303--306",

editor = "D Tsoukalas and A Dimoulas and Y Papananos and S Galata",

booktitle = "Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009",

note = "39th European Solid-State Device Research Conference, ESSDERC 2009 ; Conference date: 14-09-2009 Through 18-09-2009",

}

Popadic, M, Xu, C, Sarubbi, F & Nanver, LK 2009, C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile. in D Tsoukalas, A Dimoulas, Y Papananos & S Galata (eds), Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009. IEEE Society, Athens, Greece, pp. 303-306, 39th European Solid-State Device Research Conference, ESSDERC 2009, 14/09/09.

C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile. / Popadic, M; Xu, C; Sarubbi, F et al.
Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009. ed. / D Tsoukalas; A Dimoulas; Y Papananos; S Galata. Athens, Greece: IEEE Society, 2009. p. 303-306.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile

AU - Popadic, M

AU - Xu, C

AU - Sarubbi, F

AU - Nanver, LK

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 303

EP - 306

BT - Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009

A2 - Tsoukalas, D

A2 - Dimoulas, A

A2 - Papananos, Y

A2 - Galata, S

PB - IEEE Society

CY - Athens, Greece

T2 - 39th European Solid-State Device Research Conference, ESSDERC 2009

Y2 - 14 September 2009 through 18 September 2009

ER -