@inproceedings{d859d6bd786945f7b223ebedef113589,
title = "C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile",
keywords = "Conf.proc. > 3 pag",
author = "M Popadic and C Xu and F Sarubbi and LK Nanver",
year = "2009",
language = "Undefined/Unknown",
publisher = "IEEE",
pages = "303--306",
editor = "D Tsoukalas and A Dimoulas and Y Papananos and S Galata",
booktitle = "Proceedings of 39th European Solid-State Device Research Conference, ESSDERC 2009",
address = "United States",
note = "39th European Solid-State Device Research Conference, ESSDERC 2009 ; Conference date: 14-09-2009 Through 18-09-2009",
}