Capping layer for EUV optical elements.

M Singh (Inventor)

Research output: Patent

Original languageUndefined/Unknown
IPCPatent Nummer: 00305432.7-2217; Aanvrager: ASML
Priority date28/06/00
Publication statusPublished - 2000

Bibliographical note

Patent Nummer: 00305432.7-2217; Aanvrager: ASML

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