Characterization of new EUV stable silicon photodiodes

F Scholze, C Laubis, F Sarubbi, LK Nanver, S Nihtianov

Research output: Contribution to conference › Poster › Scientific

Original language	Undefined/Unknown
Publication status	Published - 2008
Event	2008 international symposium on extreme ultraviolet lithography - Lake Tahoe, California, USA Duration: 28 Sept 2008 → 1 Oct 2008

Other	2008 international symposium on extreme ultraviolet lithography
Period	28/09/08 → 1/10/08

s.n.

Keywords

@conference{73c015529b694d7ba535242b1706030e,

title = "Characterization of new EUV stable silicon photodiodes",

keywords = "Geen BTA classificatie",

author = "F Scholze and C Laubis and F Sarubbi and LK Nanver and S Nihtianov",

note = "s.n.; 2008 international symposium on extreme ultraviolet lithography ; Conference date: 28-09-2008 Through 01-10-2008",

year = "2008",

language = "Undefined/Unknown",

}