Characterization of pure boron depositions integrated in silicon diodes for nanometer deep junction applications

F Sarubbi

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Nanver, Lis, Supervisor
Award date18 Jan 2010
Place of PublicationDelft
Print ISBNs978-90-8570-436-2
Publication statusPublished - 2010


  • Diss. prom. aan TU Delft

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