Characterization of pure boron depositions integrated in silicon diodes for nanometer deep junction applications

F Sarubbi

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Nanver, Lis, Supervisor
Award date	18 Jan 2010
Place of Publication	Delft
Print ISBNs	978-90-8570-436-2
Publication status	Published - 2010

Keywords

@phdthesis{3216a51cd85d4d02ac21c571c7820140,

title = "Characterization of pure boron depositions integrated in silicon diodes for nanometer deep junction applications",

keywords = "Diss. prom. aan TU Delft",

author = "F Sarubbi",

year = "2010",

language = "English",

isbn = "978-90-8570-436-2",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}