Coherent Fourier Scatterometry

N Kumar

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Urbach, H.P., Supervisor
  • Pereira, S.F., Advisor
Award date1 Dec 2014
Place of PublicationEnschede
Publisher
Print ISBNs9789462594685
Publication statusPublished - 2014

Keywords

  • Diss. prom. aan TU Delft

Cite this

Kumar, N. (2014). Coherent Fourier Scatterometry. Ipskamp.