Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1-xGex nanostructures

R Pantel, MC Cheynet, FD Tichelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{2662d3c1e884438a894f28a101a3010f,

title = "Comparison of Si and Ge low-loss spectra to interpret the Ge contrast in EFTEM images of Si1-xGex nanostructures",

keywords = "CWTS JFIS < 0.75",

author = "R Pantel and MC Cheynet and FD Tichelaar",

year = "2006",

language = "Undefined/Unknown",

volume = "37",

pages = "657--665",

journal = "Micron",

issn = "0968-4328",

publisher = "Elsevier",

number = "7",

}