Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering

Damon Rafieian, Wojciech Ogieglo, Tom Savenije, Rob G H Lammertink

Research output: Contribution to journalArticleScientificpeer-review

47 Citations (Scopus)
28 Downloads (Pure)


We discuss the formation of TiO2 thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous films that crystallise upon annealing to anatase or rutile, depending on the initial sputtering conditions. Substoichiometric films (TiOx), obtained by sputtering at relatively low oxygen concentration, formed rutile upon annealing in air, whereas stoichiometric films formed anatase. This route therefore presents a formation route for rutile films via lower (

Original languageEnglish
Article number097168
JournalAIP Advances
Issue number9
Publication statusPublished - 1 Sep 2015


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