Copper film microgrid through-wafer metalization

VG Kutchoukov, G Craciun, S Sakarya, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	MME'02 micromechanics Europe
Place of Publication	Bucharest
Publisher	Nat. Inst. for Res. an developmnet in Microtechnologies
Pages	91-94
Number of pages	4
ISBN (Print)	973-0-02472-3
Publication status	Published - 2002
Event	13th micromechanics Europe workshop MME 2002 - Bucharest Duration: 6 Oct 2002 → 8 Oct 2002

Name
Publisher	Nat. Inst. for Res. an developmnet in Microtechnologies

Conference	13th micromechanics Europe workshop MME 2002
Period	6/10/02 → 8/10/02

Keywords

@inproceedings{d4b28a013b024b46ace6153dfde8f08f,

title = "Copper film microgrid through-wafer metalization",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "VG Kutchoukov and G Craciun and S Sakarya and JR Mollinger and A Bossche",

year = "2002",

language = "Undefined/Unknown",

isbn = "973-0-02472-3",

publisher = "Nat. Inst. for Res. an developmnet in Microtechnologies",

pages = "91--94",

booktitle = "MME'02 micromechanics Europe",

note = "13th micromechanics Europe workshop MME 2002 ; Conference date: 06-10-2002 Through 08-10-2002",

}

TY - GEN

T1 - Copper film microgrid through-wafer metalization

AU - Kutchoukov, VG

AU - Craciun, G

AU - Sakarya, S

AU - Mollinger, JR

AU - Bossche, A

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 973-0-02472-3

SP - 91

EP - 94

BT - MME'02 micromechanics Europe

PB - Nat. Inst. for Res. an developmnet in Microtechnologies

CY - Bucharest

T2 - 13th micromechanics Europe workshop MME 2002

Y2 - 6 October 2002 through 8 October 2002

ER -