Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

V Rochus, DJ Rixen, JC Golinval

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationModeling and Simulation of Microsystems
Editors NSTI
Place of PublicationBoston
PublisherNSTI
Pages1-4
Number of pages4
ISBN (Print)0-9767985-9-x
Publication statusPublished - 2006
EventNSTI Nanotech 2006 - Boston
Duration: 7 May 200711 May 2007

Publication series

Name
PublisherNSTI

Conference

ConferenceNSTI Nanotech 2006
Period7/05/0711/05/07

Keywords

  • Conf.proc. > 3 pag

Cite this

Rochus, V., Rixen, DJ., & Golinval, JC. (2006). Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams. In NSTI (Ed.), Modeling and Simulation of Microsystems (pp. 1-4). NSTI.