@inproceedings{4c74fb23e9604ca8ae701e34bb512e04,
title = "Coupled electro-mechanics simulation methodology of the dynamic pull-in micro-systems",
keywords = "Conf.proc. > 3 pag",
author = "V Rochus and DJ Rixen and JC Golinval",
year = "2005",
language = "Undefined/Unknown",
isbn = "0-7803-9062-8",
publisher = "IEEE Society",
pages = "359--365",
editor = "LJ Ernst and GQ Zhang and P Rodgers and S Marco and {de Saint Leger}, O",
booktitle = "Proceedings of the 6th international conference on thermal, mechanical and multi-physics simulation and experiments in micro-electronics and micro-systems",
note = "6th international conference on thermal, mechanical and multi-physics simulation and experiments in micro-electronics and micro-systems, Berlin, Germany ; Conference date: 18-04-2005 Through 20-04-2005",
}