Defect production during ion-assisted deposition of molybdenum films studied by molecular dynamics.

P Klaver, BJ Thijsse

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	51-56
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	504
Publication status	Published - 1999

Cite this

@article{d258edd97a474a12a45cf040ceda2c15,

title = "Defect production during ion-assisted deposition of molybdenum films studied by molecular dynamics.",

author = "P Klaver and BJ Thijsse",

year = "1999",

language = "Undefined/Unknown",

volume = "504",

pages = "51--56",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}