Defect-selective etching of SiC

JL Weyher, S Lazar, J Borysiuk, J Pernot

    Research output: Contribution to journalArticleScientificpeer-review

    26 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)578-583
    Number of pages6
    JournalPhysica Status Solidi. A: Applications and Materials Science
    Volume202
    Issue number4
    Publication statusPublished - 2005

    Keywords

    • academic journal papers
    • ZX CWTS JFIS < 1.00

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