Defect-selective etching of SiC

JL Weyher, S Lazar, J Borysiuk, J Pernot

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	578-583
Number of pages	6
Journal	Physica Status Solidi. A: Applications and Materials Science
Volume	202
Issue number	4
Publication status	Published - 2005

Keywords

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title = "Defect-selective etching of SiC",

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author = "JL Weyher and S Lazar and J Borysiuk and J Pernot",

year = "2005",

language = "Undefined/Unknown",

volume = "202",

pages = "578--583",

journal = "Physica Status Solidi. A: Applications and Materials Science",

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TY - JOUR

T1 - Defect-selective etching of SiC

AU - Weyher, JL

AU - Lazar, S

AU - Borysiuk, J

AU - Pernot, J

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 1862-6300

VL - 202

SP - 578

EP - 583

JO - Physica Status Solidi. A: Applications and Materials Science

JF - Physica Status Solidi. A: Applications and Materials Science

IS - 4

ER -