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Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor
Arjen Didden, Philipp Hillebrand, Markus Wollgarten, Bernard Dam, Roel van de Krol*
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
3
Citations
(Scopus)