@inproceedings{494608a04f444586903fd2af3c5744d2,
title = "Design and fabrication of multiple airgap-based visible filters",
author = "M Ghaderi and RF Wolffenbuttel",
note = "Harvest; Micro-Optics 2014, Brussels, Belgium ; Conference date: 14-04-2014 Through 16-04-2014",
year = "2014",
doi = "10.1117/12.2052554",
language = "English",
isbn = "9781628410785",
publisher = "SPIE",
pages = "1--8",
editor = "H Thienpont and J Mohr and H Zappe and H Nakajima",
booktitle = "Micro-Optics 2014",
address = "United States",
}