Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture

I Sabageh, V Rajaraman, E Cretu, PJ French

Research output: Contribution to conference › Poster › Professional

Original language	English
Publication status	Published - 2010
Event	Micromechanics and Micro systems Europe 2010 - Enschede, The Netherlands Duration: 5 Sept 2010 → 8 Sept 2010

Other	Micromechanics and Micro systems Europe 2010
Period	5/09/10 → 8/09/10

MME

Keywords

@conference{ceec4ef1ab064062a5899eaea9cac3b4,

title = "Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture",

keywords = "Conf.proc. > 3 pag",

author = "I Sabageh and V Rajaraman and E Cretu and PJ French",

note = "MME; Micromechanics and Micro systems Europe 2010 ; Conference date: 05-09-2010 Through 08-09-2010",

year = "2010",

language = "English",

}