Design and modeling of a three mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture

I Sabageh, V Rajaraman, E Cretu, PJ French

Research output: Contribution to conferencePosterProfessional

Original languageEnglish
Publication statusPublished - 2010
EventMicromechanics and Micro systems Europe 2010 - Enschede, The Netherlands
Duration: 5 Sep 20108 Sep 2010

Other

OtherMicromechanics and Micro systems Europe 2010
Period5/09/108/09/10

Keywords

  • Conf.proc. > 3 pag

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