Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

I Sabageh, V Rajaraman, E Cretu, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication21st Micromechanics and Micro systems Europe 2010
EditorsJ van Honschoten, H Verputten, H Groenland
Place of PublicationEnschede, The Netherlands
PublisherMME
Pages96-99
Number of pages4
Publication statusPublished - 2010
Event MME 2010: Micromechanics and Microsystems Europe Workshop - Enschede, The Netherlands
Duration: 26 Sep 201029 Sep 2010

Publication series

Name
PublisherMME

Conference

Conference MME 2010
Period26/09/1029/09/10

Keywords

  • Conf.proc. > 3 pag

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