@inproceedings{f46f5f4281464feca0ef60ff281b2607,
title = "Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture",
keywords = "Conf.proc. > 3 pag",
author = "I Sabageh and V Rajaraman and E Cretu and PJ French",
year = "2010",
language = "Undefined/Unknown",
publisher = "MME",
pages = "96--99",
editor = "{van Honschoten}, J and H Verputten and H Groenland",
booktitle = "21st Micromechanics and Micro systems Europe 2010",
note = " MME 2010 ; Conference date: 26-09-2010 Through 29-09-2010",
}