Developer etched single and arrays of three {100} planes silicon nanowires (SiNWs) FET

TSY Moh, Y Maruyama, G Pandraud, LCPM de Smet, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Contribution to conferencePosterProfessional

Original languageEnglish
Publication statusPublished - 2011
EventSTW SAFE conference - Veldhoven
Duration: 14 Nov 201115 Nov 2011

Conference

ConferenceSTW SAFE conference
Period14/11/1115/11/11

Keywords

  • Geen BTA classificatie

Cite this

Moh, TSY., Maruyama, Y., Pandraud, G., de Smet, LCPM., van Rijn, C., Sudholter, EJR., & Sarro, PM. (2011). Developer etched single and arrays of three {100} planes silicon nanowires (SiNWs) FET. Poster session presented at STW SAFE conference, .