Direct spray coating of photoresist for MEMS applications

PN Pham; TLM Scholtes; R Klerk; B Wieder; PM Sarro; JN Burghartz

Direct spray coating of photoresist for MEMS applications

PN Pham, TLM Scholtes, R Klerk, B Wieder, PM Sarro, JN Burghartz

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

16 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE. Vol. 4557
Editors	J-M Karam, J Yasaitis
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	312-319
Number of pages	8
ISBN (Print)	0-8194-4285-2
Publication status	Published - 2001
Event	Micromachining and Microfabrication Pocess Technology VII, San Francisco - Bellingham Duration: 22 Oct 2001 → 24 Oct 2001

Publication series

Name
Publisher	International Society for Optical Engineering

Conference

Conference	Micromachining and Microfabrication Pocess Technology VII, San Francisco
Period	22/10/01 → 24/10/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{6607e26e21cf4b05a552ee4ce63c8839,

title = "Direct spray coating of photoresist for MEMS applications",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and TLM Scholtes and R Klerk and B Wieder and PM Sarro and JN Burghartz",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-8194-4285-2",

publisher = "International Society for Optical Engineering",

pages = "312--319",

editor = "{J-M Karam} and {J Yasaitis}",

booktitle = "Proceedings of SPIE. Vol. 4557",

note = "Micromachining and Microfabrication Pocess Technology VII, San Francisco ; Conference date: 22-10-2001 Through 24-10-2001",

}

TY - GEN

T1 - Direct spray coating of photoresist for MEMS applications

AU - Pham, PN

AU - Scholtes, TLM

AU - Klerk, R

AU - Wieder, B

AU - Sarro, PM

AU - Burghartz, JN

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-4285-2

SP - 312

EP - 319

BT - Proceedings of SPIE. Vol. 4557

A2 - J-M Karam, null

A2 - J Yasaitis, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Micromachining and Microfabrication Pocess Technology VII, San Francisco

Y2 - 22 October 2001 through 24 October 2001

ER -