Direct spray coating of photoresist for MEMS applications

PN Pham, TLM Scholtes, R Klerk, B Wieder, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

16 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE. Vol. 4557
Editors J-M Karam, J Yasaitis
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages312-319
Number of pages8
ISBN (Print)0-8194-4285-2
Publication statusPublished - 2001
EventMicromachining and Microfabrication Pocess Technology VII, San Francisco - Bellingham
Duration: 22 Oct 200124 Oct 2001

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceMicromachining and Microfabrication Pocess Technology VII, San Francisco
Period22/10/0124/10/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Pham, PN., Scholtes, TLM., Klerk, R., Wieder, B., Sarro, PM., & Burghartz, JN. (2001). Direct spray coating of photoresist for MEMS applications. In J-M Karam, & J Yasaitis (Eds.), Proceedings of SPIE. Vol. 4557 (pp. 312-319). International Society for Optical Engineering.