Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

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2 Citations (Scopus)

Abstract

In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.
Original languageEnglish
Title of host publication2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
PublisherIEEE
Pages1-9
Number of pages9
ISBN (Electronic)978-1-5090-2106-2
DOIs
Publication statusPublished - 5 May 2016
EventEuroSimE 2016: 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Montpellier, France
Duration: 17 Apr 201620 Apr 2016
Conference number: 17
https://www.eurosime.org/index.php/2016-montpellier/

Conference

ConferenceEuroSimE 2016
CountryFrance
CityMontpellier
Period17/04/1620/04/16
Internet address

Keywords

  • Electrodes
  • Capacitance
  • Heating
  • Analytical models
  • Sensors
  • Micromechanical devices
  • Capacitors

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  • Cite this

    Venkatesh, M., Mansouri, B. E., Wei, J., Bossche, A., & Zhang, G. Q. (2016). Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (pp. 1-9). IEEE. https://doi.org/10.1109/eurosime.2016.7463385