An electrothermally-activated polymeric stacked actuator is presented to generate a rectilinear in-plane actuation. The actuator has a novel composite design, comprising of SU8 thermal expandable polymer, a silicon heat conductor and a top thin-film aluminium heater. The silicon heat conductor has a symmetric meandering shape. It extends through a thick SU8 layer. Theory and numerical analyses show that this design offers advantages of enhanced longitudinal thermal expansion and enhanced heat transfer across thickness of the insulating SU8 layer. It is effective in electromechanical actuation. An activated 530-micron long micro-machined thermal stack demonstrates a longitudinal stroke of 13 microns at 2V and 27mW, and a low temperature rise below 300 degrees Centigrade. Therefore, it can potentially be used for wider applications where low temperature and power efficiency are concerned.
|Title of host publication||Proceedings of the 5th IEEE Conference on Sensors|
|Editors||Sukhan Lee, Masayoshi Esashi|
|Number of pages||4|
|Publication status||Published - 2006|
|Event||IEEE Sensors 2006: 5th IEEE Conference on Sensors - Daegu, Korea, Republic of|
Duration: 22 Oct 2006 → 25 Oct 2006
Conference number: 5
|Conference||IEEE Sensors 2006|
|Country||Korea, Republic of|
|Period||22/10/06 → 25/10/06|
- conference contrib. refereed
- Conf.proc. > 3 pag
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T., & Sarro, PM. (2006). Electro-thermally activated polymeric stack for linear in-plane actuation. In Sukhan Lee, & Masayoshi Esashi (Eds.), Proceedings of the 5th IEEE Conference on Sensors (pp. 538-541). IEEE Society.