@inproceedings{18648c9ba17f48d192d1108760e24a73,
title = "Enhancing silicon's functionality with additional sensing/actuating layers",
abstract = "This Silicon has long been known as an excellent material for electronic circuits and also for sensing and actuating. Effects such as the piezoresistive and Hall effects have long been used for sensing. However, there are a number of effects not found in silicon, such as piezoelectric and magnetoresistive. If these can be combined with electronic circuits the benefits of both sides can be combined. Many chemical sensors require additional layers as traps for ions or to react with the compound of interest. This paper will show how additional materials can enhance the silicon operation, but also discuss process compatibility issues.",
keywords = "coating layers, silicon transducers",
author = "French, {P. J.}",
year = "2020",
doi = "10.1109/CAS50358.2020.9268034",
language = "English",
series = "Proceedings of the International Semiconductor Conference, CAS",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
booktitle = "2020 43rd International Semiconductor Conference, CAS 2020 - Proceedings",
address = "United States",
note = "43rd International Semiconductor Conference, CAS 2020 ; Conference date: 07-10-2020 Through 09-10-2020",
}