Enhancing silicon's functionality with additional sensing/actuating layers

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Abstract

This Silicon has long been known as an excellent material for electronic circuits and also for sensing and actuating. Effects such as the piezoresistive and Hall effects have long been used for sensing. However, there are a number of effects not found in silicon, such as piezoelectric and magnetoresistive. If these can be combined with electronic circuits the benefits of both sides can be combined. Many chemical sensors require additional layers as traps for ions or to react with the compound of interest. This paper will show how additional materials can enhance the silicon operation, but also discuss process compatibility issues.

Original languageEnglish
Title of host publication2020 43rd International Semiconductor Conference, CAS 2020 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Electronic)9781728110738
DOIs
Publication statusPublished - 2020
Event43rd International Semiconductor Conference, CAS 2020 - Sinaia, Romania
Duration: 7 Oct 20209 Oct 2020

Publication series

NameProceedings of the International Semiconductor Conference, CAS
Volume2020-October

Conference

Conference43rd International Semiconductor Conference, CAS 2020
CountryRomania
CitySinaia
Period7/10/209/10/20

Keywords

  • coating layers
  • silicon transducers

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