Etching and passivation of silicon in alkaline solution: a coupled chemical/electrochemical system

XH Xia, CMA Ashruf, PJ French, J Rappich, JJ Kelly

Research output: Contribution to journalArticleScientific

40 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)5722-5729
Number of pages8
JournalThe Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)
Volume105
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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