Experimental evaluation of reset control for improved stage performance

M. F. Heertjes, K. G J Gruntjens, S. J L M van Loon, N. van de Wouw, W. P M H Heemels

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)

Abstract

A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

Original languageEnglish
Title of host publicationIFAC-PapersOnLine
Subtitle of host publicationProceedings 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing (ALCOSP 2016)
EditorsAlexander Pogromsky
Place of PublicationLaxenburg, Austria
PublisherElsevier
Pages93-98
Volume49-13
DOIs
Publication statusPublished - 2016
EventALCOSP 2016: 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing - Eindhoven, Netherlands
Duration: 29 Jun 20161 Jul 2016

Publication series

NameIFAC-PapersOnLine
Number13
Volume49

Workshop

WorkshopALCOSP 2016: 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing
Country/TerritoryNetherlands
CityEindhoven
Period29/06/161/07/16

Keywords

  • Circle criterion
  • Lyapunov stability
  • motion systems
  • reset control
  • wafer scanners

Fingerprint

Dive into the research topics of 'Experimental evaluation of reset control for improved stage performance'. Together they form a unique fingerprint.

Cite this