@inproceedings{cb754a61395f45f5b1f00e9c7a56a4ba,
title = "Experimental evaluation of reset control for improved stage performance",
abstract = "A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.",
keywords = "Circle criterion, Lyapunov stability, motion systems, reset control, wafer scanners",
author = "Heertjes, {M. F.} and Gruntjens, {K. G J} and {van Loon}, {S. J L M} and {van de Wouw}, N. and Heemels, {W. P M H}",
year = "2016",
doi = "10.1016/j.ifacol.2016.07.933",
language = "English",
volume = "49-13",
series = "IFAC-PapersOnLine",
publisher = "Elsevier",
number = "13",
pages = "93--98",
editor = "Pogromsky, {Alexander }",
booktitle = "IFAC-PapersOnLine",
note = "ALCOSP 2016: 12th IFAC Workshop on Adaptation and Learning in Control and Signal Processing ; Conference date: 29-06-2016 Through 01-07-2016",
}