Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

V Rajaraman, G Craciun, H Yang, L Pakula, EWJM van der Drift, KAA Makinwa, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationMEMS Technology and Devices
Editors A. Liu, J.Wu, C. Lu, C.D. Reddy
Place of PublicationSingapore
Publisherpan Stanford
Number of pages4
ISBN (Print)978-981-270-960-8
Publication statusPublished - 2007


  • other public output
  • Boekdeel internat.wet

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