Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Keywords

@inbook{f0ac1eb19b0047a49977bad5cf660e27,

title = "Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)",

keywords = "other public output, Boekdeel internat.wet",

author = "V Rajaraman and G Craciun and H Yang and L Pakula and {van der Drift}, EWJM and KAA Makinwa and PJ French",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-981-270-960-8",

pages = "238--241",

editor = "{A. Liu, J.Wu, C. Lu} and {C.D. Reddy}",

booktitle = "MEMS Technology and Devices",

publisher = "pan Stanford",

}

TY - CHAP

T1 - Fabrication of a SOG-MEMS vibratory gyroscope by deep RIE technology and bonding (U_SP_2_I_IC_T)

AU - Rajaraman, V

AU - Craciun, G

AU - Yang, H

AU - Pakula, L

AU - van der Drift, EWJM

AU - Makinwa, KAA

AU - French, PJ

PY - 2007

Y1 - 2007

KW - other public output

KW - Boekdeel internat.wet

M3 - Chapter

SN - 978-981-270-960-8

SP - 238

EP - 241

BT - MEMS Technology and Devices

A2 - A. Liu, J.Wu, C. Lu, null

A2 - C.D. Reddy, null

PB - pan Stanford

CY - Singapore

ER -