Fabrication of mechanical structures using macro-porous silicon

H Ohji, S Izuo, PJ French, K Tsutsumi

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE Vol. 4592
Editors	J-C Chiao
Place of Publication	Bellingham
Publisher	SPIE
Pages	96-103
Number of pages	8
ISBN (Print)	0-8194-4322-0
Publication status	Published - 2001
Event	Device and Process Technologies for MEMS and Microelectronics II, Adelaide - Bellingham Duration: 17 Dec 2001 → 19 Dec 2001

Name
Publisher	SPIE Press

Conference	Device and Process Technologies for MEMS and Microelectronics II, Adelaide
Period	17/12/01 → 19/12/01

Keywords

@inproceedings{49e906b51a6f4fadae70fe2c6bc23407,

title = "Fabrication of mechanical structures using macro-porous silicon",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Ohji and S Izuo and PJ French and K Tsutsumi",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-8194-4322-0",

publisher = "SPIE",

pages = "96--103",

editor = "{J-C Chiao}",

booktitle = "Proceedings of SPIE Vol. 4592",

address = "United States",

note = "Device and Process Technologies for MEMS and Microelectronics II, Adelaide ; Conference date: 17-12-2001 Through 19-12-2001",

}

TY - GEN

T1 - Fabrication of mechanical structures using macro-porous silicon

AU - Ohji, H

AU - Izuo, S

AU - French, PJ

AU - Tsutsumi, K

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-4322-0

SP - 96

EP - 103

BT - Proceedings of SPIE Vol. 4592

A2 - J-C Chiao, null

PB - SPIE

CY - Bellingham

T2 - Device and Process Technologies for MEMS and Microelectronics II, Adelaide

Y2 - 17 December 2001 through 19 December 2001

ER -