Fabrication of vertical electrodes on channel sidewall for picoliter liquid measurement

J Wei, M van der Velden, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

9 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationThe 14th International Conference on Solid-State Sensors, Acuators and Microsystems
Editors IEEE
Place of PublicationLyon
PublisherIEEE Society
Pages1613-1616
Number of pages4
ISBN (Print)1-4244-0842-3
Publication statusPublished - 2007
EventThe 14th International Conference on Solid-State Sensors, Acuators and Microsystems - Lyon
Duration: 10 Jun 200714 Jun 2007

Publication series

Name
PublisherIEEE

Conference

ConferenceThe 14th International Conference on Solid-State Sensors, Acuators and Microsystems
Period10/06/0714/06/07

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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