Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 2: Thermal property, and sensitivity

F jutzi, DHB Wicaksono, G Pandraud, N de rooij, PJ French

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)126-138
Number of pages13
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume152
Publication statusPublished - 2009

Keywords

  • CWTS 0.75 <= JFIS < 2.00

Cite this