First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)

S. M. Leinders*, K. W A Van Dongen, N. De Jong, M. D. Verweij, W. J. Westerveld, H. P. Urbach, P. L M J Van Neer, J Pozo

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the electrical impedance matching of the elements. As an alternative, we fabricated an optical micro-machined ultrasound transducer (OMUT). This sensor contains an optical micro-ring resonator, which is coupled to a photonic waveguide, and integrated onto an acoustical membrane. The OMUT is build with standard silicon-on-insulator (SOI) technology, allowing for easy fabrication. In this paper, we present the first measurement results of the sensor. Our prototype has a -6 dB bandwidth of 19% and a noise equivalent pressure (NEP) of 0.5 Pa. These first acoustical measurements show that this prototype may form the basis of future ultrasound transducers.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
Number of pages4
ISBN (Electronic)9781479970490
Publication statusPublished - 2014
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 3 Sep 20146 Sep 2014


Conference2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/TerritoryUnited States


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