First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)

S. M. Leinders; K. W A Van Dongen; N. De Jong; M. D. Verweij; W. J. Westerveld; H. P. Urbach; P. L M J Van Neer; J Pozo

doi:10.1109/ULTSYM.2014.0642

First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)

S. M. Leinders^*, K. W A Van Dongen, N. De Jong, M. D. Verweij, W. J. Westerveld, H. P. Urbach, P. L M J Van Neer, J Pozo

^*Corresponding author for this work

ImPhys/Optics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the electrical impedance matching of the elements. As an alternative, we fabricated an optical micro-machined ultrasound transducer (OMUT). This sensor contains an optical micro-ring resonator, which is coupled to a photonic waveguide, and integrated onto an acoustical membrane. The OMUT is build with standard silicon-on-insulator (SOI) technology, allowing for easy fabrication. In this paper, we present the first measurement results of the sensor. Our prototype has a -6 dB bandwidth of 19% and a noise equivalent pressure (NEP) of 0.5 Pa. These first acoustical measurements show that this prototype may form the basis of future ultrasound transducers.

Original language	English
Title of host publication	IEEE International Ultrasonics Symposium, IUS
Publisher	IEEE
Pages	2572-2575
Number of pages	4
ISBN (Electronic)	9781479970490
DOIs	https://doi.org/10.1109/ULTSYM.2014.0642
Publication status	Published - 2014
Event	2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States Duration: 3 Sept 2014 → 6 Sept 2014

Conference

Conference	2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/Territory	United States
City	Chicago
Period	3/09/14 → 6/09/14

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10.1109/ULTSYM.2014.0642

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title = "First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)",

abstract = "Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the electrical impedance matching of the elements. As an alternative, we fabricated an optical micro-machined ultrasound transducer (OMUT). This sensor contains an optical micro-ring resonator, which is coupled to a photonic waveguide, and integrated onto an acoustical membrane. The OMUT is build with standard silicon-on-insulator (SOI) technology, allowing for easy fabrication. In this paper, we present the first measurement results of the sensor. Our prototype has a -6 dB bandwidth of 19% and a noise equivalent pressure (NEP) of 0.5 Pa. These first acoustical measurements show that this prototype may form the basis of future ultrasound transducers.",

author = "Leinders, {S. M.} and {Van Dongen}, {K. W A} and {De Jong}, N. and Verweij, {M. D.} and Westerveld, {W. J.} and Urbach, {H. P.} and {Van Neer}, {P. L M J} and J Pozo",

year = "2014",

doi = "10.1109/ULTSYM.2014.0642",

language = "English",

pages = "2572--2575",

booktitle = "IEEE International Ultrasonics Symposium, IUS",

publisher = "IEEE",

address = "United States",

note = "2014 IEEE International Ultrasonics Symposium, IUS 2014 ; Conference date: 03-09-2014 Through 06-09-2014",

}

Leinders, SM, Van Dongen, KWA , De Jong, N , Verweij, MD , Westerveld, WJ , Urbach, HP , Van Neer, PLMJ & Pozo, J 2014, First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT). in IEEE International Ultrasonics Symposium, IUS., 6932179, IEEE, pp. 2572-2575, 2014 IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 3/09/14. https://doi.org/10.1109/ULTSYM.2014.0642

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AU - Leinders, S. M.

AU - Van Dongen, K. W A

AU - De Jong, N.

AU - Verweij, M. D.

AU - Westerveld, W. J.

AU - Urbach, H. P.

AU - Van Neer, P. L M J

AU - Pozo, J

PY - 2014

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N2 - Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the electrical impedance matching of the elements. As an alternative, we fabricated an optical micro-machined ultrasound transducer (OMUT). This sensor contains an optical micro-ring resonator, which is coupled to a photonic waveguide, and integrated onto an acoustical membrane. The OMUT is build with standard silicon-on-insulator (SOI) technology, allowing for easy fabrication. In this paper, we present the first measurement results of the sensor. Our prototype has a -6 dB bandwidth of 19% and a noise equivalent pressure (NEP) of 0.5 Pa. These first acoustical measurements show that this prototype may form the basis of future ultrasound transducers.

AB - Several types of ultrasound sensors have been developed and are used in the field of medical imaging. Conventional transducers are made of piezo-electric material and show good practical performance. However, when the piezo-electric elements need to be small (below 100 μm × 100 μm), these transducers face challenges in fabrication as well as the electrical impedance matching of the elements. As an alternative, we fabricated an optical micro-machined ultrasound transducer (OMUT). This sensor contains an optical micro-ring resonator, which is coupled to a photonic waveguide, and integrated onto an acoustical membrane. The OMUT is build with standard silicon-on-insulator (SOI) technology, allowing for easy fabrication. In this paper, we present the first measurement results of the sensor. Our prototype has a -6 dB bandwidth of 19% and a noise equivalent pressure (NEP) of 0.5 Pa. These first acoustical measurements show that this prototype may form the basis of future ultrasound transducers.

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T2 - 2014 IEEE International Ultrasonics Symposium, IUS 2014

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ER -

First measurements on a novel type of optical micro-machined ultrasound transducer (OMUT)

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