Abstract
In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Place of Publication | Danvers |
| Publisher | IEEE |
| Pages | 367-370 |
| Number of pages | 4 |
| ISBN (Electronic) | 979-8-3503-5792-9 |
| ISBN (Print) | 979-8-3503-5792-9 |
| DOIs | |
| Publication status | Published - 2024 |
| Event | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024 Conference number: 37th |
Conference
| Conference | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| Country/Territory | United States |
| City | Austin |
| Period | 21/01/24 → 25/01/24 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- Stretchable strain sensor
- Metal film
- UV laser
- Laser transmission pyrolysis
- PDMS pattering