Floating on a flowerBed

M. Krijnen, Phuc Vuong, Ron van Ostayen

Research output: Contribution to journalArticleProfessional

Abstract

Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.
Original languageEnglish
Pages (from-to)5-10
JournalMikroniek: vakblad voor precisie-technologie
Volume56
Issue number1
Publication statusPublished - 2016

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