Abstract
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.
| Original language | English |
|---|---|
| Pages (from-to) | 5-10 |
| Journal | Mikroniek: vakblad voor precisie-technologie |
| Volume | 56 |
| Issue number | 1 |
| Publication status | Published - 2016 |