Abstract
In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external low pressure.
| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Proceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand |
| Editors | Makhopadhyay, S.C. |
| Publisher | IEEE Society |
| Pages | 1040-1043 |
| Number of pages | 4 |
| ISBN (Print) | 978-1-4244-5335-1 |
| Publication status | Published - 2009 |
| Event | IEEE Sensors 2009 Conference - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009 |
Conference
| Conference | IEEE Sensors 2009 Conference |
|---|---|
| Country/Territory | New Zealand |
| City | Christchurch |
| Period | 25/10/09 → 28/10/09 |
Keywords
- conference contrib. refereed
- Conf.proc. > 3 pag