Gas ambient dependence of quality factor in MEMS resonators

Q Li, JFL Goosen, F van Keulen, JTM van Beek

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

2 Citations (Scopus)


In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external low pressure.
Original languageUndefined/Unknown
Title of host publicationProceedings of the IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand
Editors Makhopadhyay, S.C.
PublisherIEEE Society
Number of pages4
ISBN (Print)978-1-4244-5335-1
Publication statusPublished - 2009
EventIEEE Sensors 2009 Conference - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009


ConferenceIEEE Sensors 2009 Conference
Country/TerritoryNew Zealand


  • conference contrib. refereed
  • Conf.proc. > 3 pag

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