Gas Source MBE growth of Si/SiGe device materials

K Werner, AJ Storm, S Butzke, JWH Maes, M van Rooy, PFA Alkemade, E Algra, MAJ Somers, BGM de Lange, EWJM van der Drift, T Zijlstra, S Radelaar

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)223-234
Number of pages12
JournalJournal of Crystal Growth
Publication statusPublished - 1996

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