Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

V Podgursky; A Bogatov; V Sedov; I Sildos; A Mere; M Viljus; JG Buijnsters; V Ralchenko

doi:10.1016/j.diamond.2015.07.002

Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

V Podgursky, A Bogatov, V Sedov, I Sildos, A Mere, M Viljus, JG Buijnsters, V Ralchenko

Micro and Nano Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

18 Citations (Scopus)

Original language	English
Pages (from-to)	172-179
Number of pages	8
Journal	Diamond and Related Materials
Volume	58
DOIs	https://doi.org/10.1016/j.diamond.2015.07.002
Publication status	Published - 2015

Bibliographical note

Harvest

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10.1016/j.diamond.2015.07.002

Cite this

Podgursky, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, JG., & Ralchenko, V. (2015). Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology. Diamond and Related Materials, 58, 172-179. https://doi.org/10.1016/j.diamond.2015.07.002

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title = "Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology",

author = "V Podgursky and A Bogatov and V Sedov and I Sildos and A Mere and M Viljus and JG Buijnsters and V Ralchenko",

note = "Harvest",

year = "2015",

doi = "10.1016/j.diamond.2015.07.002",

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journal = "Diamond and Related Materials",

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Podgursky, V, Bogatov, A, Sedov, V, Sildos, I, Mere, A, Viljus, M, Buijnsters, JG & Ralchenko, V 2015, 'Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology', Diamond and Related Materials, vol. 58, pp. 172-179. https://doi.org/10.1016/j.diamond.2015.07.002

Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology. / Podgursky, V; Bogatov, A; Sedov, V et al.
In: Diamond and Related Materials, Vol. 58, 2015, p. 172-179.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

AU - Podgursky, V

AU - Bogatov, A

AU - Sedov, V

AU - Sildos, I

AU - Mere, A

AU - Viljus, M

AU - Buijnsters, JG

AU - Ralchenko, V

N1 - Harvest

PY - 2015

Y1 - 2015

U2 - 10.1016/j.diamond.2015.07.002

DO - 10.1016/j.diamond.2015.07.002

M3 - Article

SN - 0925-9635

VL - 58

SP - 172

EP - 179

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -