Helium desorption from cavities induced by 3-He and 4-He implantation in silicon

S Godey, E Ntsoenzok, T Sauvage, A van Veen, F Labohm, MF Beaufort, JF Barbot

    Research output: Contribution to journalArticleScientificpeer-review

    38 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)54-59
    Number of pages6
    JournalMaterials Science and Engineering B: Advanced Functional Solid-state Materials
    Volume73
    Issue number1-3
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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