Helium desorption from cavities induced by 3-He and 4-He implantation in silicon

S Godey, E Ntsoenzok, T Sauvage, A van Veen, F Labohm, MF Beaufort, JF Barbot

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	54-59
Number of pages	6
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	73
Issue number	1-3
Publication status	Published - 2000

Keywords

@article{d3df25189fb34d978a82150431868c61,

title = "Helium desorption from cavities induced by 3-He and 4-He implantation in silicon",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Godey and E Ntsoenzok and T Sauvage and {van Veen}, A and F Labohm and MF Beaufort and JF Barbot",

year = "2000",

language = "Undefined/Unknown",

volume = "73",

pages = "54--59",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Helium desorption from cavities induced by 3-He and 4-He implantation in silicon

AU - Godey, S

AU - Ntsoenzok, E

AU - Sauvage, T

AU - van Veen, A

AU - Labohm, F

AU - Beaufort, MF

AU - Barbot, JF

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0921-5107

VL - 73

SP - 54

EP - 59

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

IS - 1-3

ER -