Helium ion beam induced growth of hammerhead AFM probes

G Nanda, E van Veldhoven, D Maas, H Sadeghian, PFA Alkemade

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Issue number6
Publication statusPublished - 2015

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