High-rate deposition of microcrystalline silicon with an expanding thermal plasma

C Smit, A Klaver, BA Korevaar, AMHN Petit, DL Williamson, RACMM van Swaaij, MCM van de Sanden

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)280-293
Number of pages14
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 2005


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