IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

TSY Moh; Y Maruyama; C Shen; G Pandraud; LCPM de Smet; HD Tong; C. van Rijn; EJR Sudholter; PM Sarro

doi:10.1109/TRANSDUCERS.2011.5969796

IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

TSY Moh, Y Maruyama, C Shen, G Pandraud, LCPM de Smet, HD Tong, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Title of host publication	Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
Editors	Y Wu
Place of Publication	Beijing, China
Publisher	IEEE
Pages	1590-1593
Number of pages	4
ISBN (Print)	978-1-4577-0156-6
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969796
Publication status	Published - 2011
Event	Transducers 2011 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name
Publisher	IEEE

Conference

Conference	Transducers 2011
Period	5/06/11 → 9/06/11

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1109/TRANSDUCERS.2011.5969796

Cite this

Moh, TSY., Maruyama, Y., Shen, C., Pandraud, G., de Smet, LCPM., Tong, HD., van Rijn, C., Sudholter, EJR., & Sarro, PM. (2011). IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing. In Y. Wu (Ed.), Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 1590-1593). IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969796

@inproceedings{473b81c6e3c24fa882f0b6639c7c4a46,

title = "IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "TSY Moh and Y Maruyama and C Shen and G Pandraud and {de Smet}, LCPM and HD Tong and {van Rijn}, C. and EJR Sudholter and PM Sarro",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969796",

language = "English",

isbn = "978-1-4577-0156-6",

publisher = "IEEE",

pages = "1590--1593",

editor = "Y Wu",

booktitle = "Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)",

address = "United States",

note = "Transducers 2011 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Moh, TSY, Maruyama, Y, Shen, C, Pandraud, G, de Smet, LCPM, Tong, HD, van Rijn, C, Sudholter, EJR & Sarro, PM 2011, IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing. in Y Wu (ed.), Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). IEEE, Beijing, China, pp. 1590-1593, Transducers 2011, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969796

IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing. / Moh, TSY; Maruyama, Y; Shen, C et al.
Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). ed. / Y Wu. Beijing, China: IEEE, 2011. p. 1590-1593.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

AU - Moh, TSY

AU - Maruyama, Y

AU - Shen, C

AU - Pandraud, G

AU - de Smet, LCPM

AU - Tong, HD

AU - van Rijn, C.

AU - Sudholter, EJR

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1109/TRANSDUCERS.2011.5969796

DO - 10.1109/TRANSDUCERS.2011.5969796

M3 - Conference contribution

SN - 978-1-4577-0156-6

SP - 1590

EP - 1593

BT - Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)

A2 - Wu, Y

PB - IEEE

CY - Beijing, China

T2 - Transducers 2011

Y2 - 5 June 2011 through 9 June 2011

ER -

Moh TSY, Maruyama Y, Shen C, Pandraud G, de Smet LCPM, Tong HD et al. IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing. In Wu Y, editor, Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). Beijing, China: IEEE. 2011. p. 1590-1593 doi: 10.1109/TRANSDUCERS.2011.5969796