IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

TSY Moh, Y Maruyama, C Shen, G Pandraud, LCPM de Smet, HD Tong, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationTechnical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
EditorsY Wu
Place of PublicationBeijing, China
PublisherIEEE Society
Pages1590-1593
Number of pages4
ISBN (Print)978-1-4577-0156-6
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Moh, TSY., Maruyama, Y., Shen, C., Pandraud, G., de Smet, LCPM., Tong, HD., van Rijn, C., Sudholter, EJR., & Sarro, PM. (2011). IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing. In Y. Wu (Ed.), Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 1590-1593). IEEE Society. https://doi.org/10.1109/TRANSDUCERS.2011.5969796