IC-compatible two-level bulk micromachining for RF silicon technology

PN Pham, PM Sarro, TK Ng, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationESSDERC 2000 proceedings
Editors WA Lane, T Watanabe
Place of PublicationS.l.
PublisherFrontier Group
Pages204-207
Number of pages4
ISBN (Print)2-86332-248-6
Publication statusPublished - 2000
Event30th European Solid-State Device Research Conference, Cork - S.l.
Duration: 11 Sep 200013 Sep 2000

Publication series

Name
PublisherFrontier Group

Conference

Conference30th European Solid-State Device Research Conference, Cork
Period11/09/0013/09/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Pham, PN., Sarro, PM., Ng, TK., & Burghartz, JN. (2000). IC-compatible two-level bulk micromachining for RF silicon technology. In WA Lane, & T Watanabe (Eds.), ESSDERC 2000 proceedings (pp. 204-207). Frontier Group.